Research and Educational Micro-Nano- Technology Center (MNTC)
Research Staff of Micro/Nano Technology Center:
1. Prof. Michael Manevich, Head of Micro/Nano Technology Center.
2. Prof. Yuriy Reznikov, Senior Adviser at Micro/Nano Technology Center.
3. Joseph Varshal, M.Sc., Researcher.
4. Dr. Miri Gelbaor Kirzhner, Researcher.
5. David Gelman, M.Sc., B.Ed., Researcher
6. Ygal Eisenberg, M.Sc., MBA, Researcher.
Prof. Michael Manevich
Prof. Michael Manevich is a Head of the Micro/Nano/Technology Center at the Lev Academic Center. The main fields of his specialization are nano science, materials science, electro-optics and 3D micro/nano-characterization based on the micro-interferometry, optical and atomic force microscopy. His primary scientific interests are nano-scaled phenomena, photo-induced and surface effects in organic and inorganic materials including chalcogenides, electrochromic and photochromic materials, adaptive optics and novel liquid crystal technologies, development and application of active micro/nano-devices based on liquid crystals and dielectric elastomers for the UV, visible and infrared ranges, electrochromic and photochromic macroscopic and microscopic devices.
Prof. M. Manevich was a Principal Investigator of many research and development multidisciplinary projects supported by the NATO, Peace and Security Program, the Israeli Ministry of Science, the Israeli Ministry of Industry, the Israeli Ministry of Economy, the Israeli Ministry of Infrastructures, Energy and Water Resources and other research funds. He has extensive experience in implementation of joint multidisciplinary projects with Israeli and American industrial companies. Recently Prof. M. Manevich with his team successfully completed a joint Project with the world leading company Orbotech Ltd (LC4LM – Liquid Crystal Devices for Laser Micromachining) funded by the Israeli Ministry of Industry and Trade (Program “Magneton”).
His current research involves micro/nanotechnology; active micro-electro-optics; novel liquid crystal and nano-colloidal materials and technologies; development, characterization and application of innovative active micro/nano and macroscopic electro-optical devices based on liquid crystals, nano-colloids and dielectric elastomers; technologies, materials and tools for advanced wafer level packaging; new organic and inorganic photosensitive materials; 3D nano-structuring and renewable energy.
Presently he is a Principal Investigator of five Projects, related to research and development of novel materials, design and technology for Active Micro/Nano-Electro-Optical Components, funded by the following organizations:
1. The NATO Emerging Security Challenges Division, http://www.amu.edu.pl/__data/assets/pdf_file/0016/261313/PRODUCTION-2043166-v2-AC_340-N20140057.pdf http://lcnet.org.ua/nato-for-peace/;
2. The Chief Scientist Office at the Israeli Ministry of Industry and Economy, Magnet Program, ALTIA Consortium https://infocenter.sni.technion.ac.il/sites/altia;
3. The Israeli Ministry of Environmental Protection;
4. Grant of the JCT R&D Authority, State of Israel, 2016 - 2017.
5. Grant of the JCT R&D Authority, State of Israel, 2017.
Prof. M. Manevich is a co-inventor of the unique materials for dry vacuum nanolithography and a novel method of laser induced thermal nanolithography. He is an author of more than 140 publications, 12 patents in the fields of the active liquid crystal based devices, micro/nanotechnology and advanced materials.
Prof. Yuriy Reznikov
Prof. Yuriy Reznikov is a Senior Adviser at the Micro/Nano/Technology Center. He is one of the world-leading experts in science and application of liquid crystals. Prof. Yu. Reznikov is a Chief of the Crystals Department at the Institute of Physics of Ukrainian Academy of Sciences. Prof. Yu. Reznikov’ research concerns a lot of aspects of liquid crystals fundamentals and applications.
Among his most known achievements are:
1. Study of light-induced effects, discovery of the liquid crystal photoalignment and development of the photoaligning materials (together with co-authors).
2. Investigation of composite liquid crystal systems and development of nano-colloids based on the ferroelectric nano-particles in liquid crystals.
3. Discovery of the liquid crystal conformational nonlinearity.
4. Development of the novel electrically-controllable micro-optical components based on liquid crystals (together with Prof. Manevich’ team).
Prof. Yu. Reznikov provides an extremely extended collaboration with a leading international liquid crystal centers in the USA, UK, Italy, France, Korea and Poland. Collaboration with these partners is provided by the numerous international grants that were won by Prof. Yu. Reznikov and his team during the last decades: 3 grants from CRDF (US government grant), 5 EU INTAS grants, 2 NATO grants, Econet grant from France government. He has more than 170 publications and 21 patents in the field of advanced liquid crystal materials.
Joseph Varshal, M.Sc.
Joseph Varshal received his M.Sc. from the Novosibirsk Technical University, Russia in Micromechanics and Microelectronics. Joseph has extensive experience in micromechanics, micro/nanotechnology including micro nano and macroscopic sized antennas, micro-optics, diffractive optics and microelectronics technology, including modern photo-lithographic techniques, chemical and thermal processes; liquid crystal application in active micro-optics technology; development and fabrication of antireflective and protective coatings; thin film vacuum evaporation of metal, semiconductor and dielectric materials; precision wet and dry etch processes of metal, semiconductor and dielectric thin films and substrate materials. He participated in many joint R&D and industrial projects with Israeli and Russian Hi-Tech industrial companies. He has numerous publications, 6 patents and 27 published projects in the field of micro-technology. Currently he serves as a Researcher at the Micro/Nano/Technology Center.
Dr. Miri Gelbaor Kirzhner
Dr. Miri Gelbaor Kirzhner received her B.Sc. in physics, and M.Sc. (summa cum laude) and Ph.D. in Electro-Optics Engineering from Ben-Gurion University of the Negev (Beer-Sheva, Israel). Her M.Sc. and Ph.D. studies dealt with liquid crystal devices integrated with nano-dimensional chalcogenide films. Dr. Miri Gelbaor Kirzhner has experience in Nematic and Ferroelectric liquid crystal devices, thin films, chalcogenide glasses, photoalignment of liquid crystals, integrated optical devices, nano-photonics and optically addressed spatial light modulators. Her experience also includes design, fabrication and characterization of optical devices, and working in a clean room class 100. She has several publications, and was awarded the Negev scholarship for excellent doctoral students. Currently she serves as a Researcher at the Micro/Nano/Technology Center.
David Gelman, M.Sc., B.Ed., Engineer
David Gelman received his B.Ed. (Bachelor of Education) in Electricity and Electronic Teaching from the Academic College for Technological Teachers, his M.Sc. and Engineer degree in Electronics Engineering from the Moscow Institute of Electronics Engineering, Faculty for Automation and Computing Technique.
He has extensive experience in the following research areas:
1. Development of design, calculation and optimization of Integrated Circuits.
2. Development of methodology, and tools for measuring and testing of Integrated Circuits.
3. Design and development of high speed TTL monolithic circuits with dual-phase output (patented in co-authorship with others), this device has awarded a Gold Medal at the Leipzig Fair, Germany and the All-Union Exhibition of USSR, Moscow.
4. He guided a number of projects (more than two hundred) and their application in various areas: Medicine, Police, Military and others.
5. David Gelman was an adviser for the following industrial companies: SATEC, MINICOM, INTEL and others in different aspects of the electronic area.
6. He invented 2005 – 2007 Design & Assembly of two innovative cooling systems for the Intel Design Center, Haifa.
7. May 2014 nominated as a Major Couch of National Israel Team in Electronic area for World Skills Competition. August 2015 participated as such in San Paulo World Skills Competition and as International Expert and Judge.
David Gelman participated in many joint R&D and industrial projects with Israeli and Russian Hi-Tech industrial companies.
He has numerous publications in the field of Digital Electronics, Digital Systems, Semiconductor Electronic Devices and Technology. The main publications in the field of Integrated Circuits were prepared for the internal use within institutions and industrial companies and classified in the USSR as not accessible for open publication. A number of articles were published in open Russian journals.
Awards and Prizes
The following Projects under supervision of David Gelman were awarded and won Prizes:
1. Design and development of high speed TTL monolithic circuits with paraphrase output (patented in co-authorship with others). This device has awarded two Gold Medals at the Leipzig Fair, Germany and at the All-Union Exhibition of USSR, Moscow.
2. Two Projects under supervision of David Gelman with the "Torah u Mada" High-school/College won prizes of the "Young Scientists" competition at "Weitzman Institute of Science" (First Prize of 2005 year and Second Prize of 2002 year).
3. Several projects have been awarded by "Cum Laude" citation by Intel's and Science Museum "Young Scientists" competition of 2003 year (two projects), 2008 year (two projects), 2009 year (two projects), 2010 year (one project), and 2011 year (one project).
4. The Project (“Antileaks”) won the Third prize in his category in the World Intel competition of Young Scientist (ISEF 2012) in Pittsburgh Pennsylvania.
5. The project “AQUASTOP” won First Prize of 2010 year in Stockholm, Junior Water Prize (SJWP) in Israel and awarded by Crown Diploma of SJWP in Stockholm competition.
6. The other project “Smart Water Heater” won also First Prize of 2012 year in Stockholm Junior Water Prize (SJWP) in Israel.
7. Every year more than 10 projects he supervised participate in annual “Electronics Projects Competition” of the Israeli Ministry of Education. The project “Following Robot” won “The Prize of Mafmar” of 2010 year. The project “Smart House” won First Prize of 2017 year in category of Technicians’ Diploma Projects.
8. In March 2013 David Gelman was awarded by “Special award and testimonial by the Israeli Ministry of Education as an appreciation and recognition for his special role and contribution in the Electronics and Computers division in the "Tora U Mada Yeshiva near the Machon Lev" institution in Jerusalem for his leadership, knowledge, professionalism and high motivation he gave the students bringing them and their accomplishments to impressive results all while Mr. Gelman was, and still is, devoted and passionate to the Electronics studies, knowledge and special projects build/creation”.
Currently David Gelman serves as a Researcher at the Micro/Nano/Technology Center and Senior Lecturer in Electricity Engineering, Analog & Digital Electronics, Digital Systems, Technology &Electronic Devices, and Supervisor of Diploma Projects at the Lev Academic Center.
Ygal Eisenberg, M.Sc., MBA
Ygal Eisenberg received his B.Tech. in electro-optics and MBA from the Jerusalem College of Technology and holds his M.Sc. in electro-optics from the Ben-Gurion University of the Negev (Beer Sheva, Israel). He is currently PhD student of the Electro-optics Engineering Department at the Ben-Gurion University of the Negev. Y. Eisenberg prepares a thesis in a photovoltaic area. He has experience in design, technology and characterization of diffractive optical elements, micro-optics and micro-lithography. His scope of the interests includes an advanced micro-technology systems, 3D characterization of micro-structures using optical microscopy, white-light micro-interferometry and multi-wavelength confocal scanning microscopy. Y. Eisenberg has several publications in the micro-technology area. He received the First Prize of the Israeli section of the International Solar Energy Society for the first degree final project on June, 2007. Currently he serves as a Researcher at the Micro/Nano/Technology Center.
Main Research Areas of the Micro/Nano/Technology Center:
• Nano Science
• Materials Science
• Renewable Energy
• Active Micro/Electro/Optics
• Tunable Micro, Nano and Macroscopic Sized Antenna Arrays
• Technologies, Materials and Tools for Advanced Wafer Level Packaging
• 3D Micro/Nano Characterization
Basic Developed Passive and Active Nano, Micro and Macroscopic Electro-Optical and Electronic Components
• Micro-lens Arrays
• Micro-mirror Arrays
• Fresnel Micro-lens Arrays
• Micro-prism Arrays
• Single Macroscopic Lenses and Macroscopic Lens Arrays
• Optical Micro Waveguide Arrays
• Optical Micro Routers
• Nano-antenna Arrays for Visible Range
• Micro-antenna Arrays for Infrared Range
Developed Technologies for Basic Passive and Active Nano, Micro and Macroscopic Electro-Optical and Electronic Components
1. Gray Scale Micro-Lithography Method
2. Casting Technology using Cold Embossing Mold
3. Gap Micro-Lithography Method
4. Modified Proximity Micro-Lithography Method
5. Thermal Reflow Method
6. Reactive-Ion Etching
7. 3D Double-sided Alignment
8. Micro Scale Vacuum Packaging
9. Room Temperature Vacuum Sealing
Basic Materials for Passive UV, Visible and IR Nano, Micro and Macroscopic Electro-Optical and Electronic Components
1. Silicon (Si): Transmission range of 1.2 to 7.0 μm
2. Gallium Arsenide (GaAs): Transmission range of 2 to 15 μm
3. Germanium (Ge): Transmission range of 2 to 14 μm
4. Fused Silica (SiO2), IR Grade: Transmission range of 0.25 to 3.5 μm
5. BK7 Schott Glass: Transmission range of 0.35 to 2.0 μm
6. Optical Polymer: Transmission ranges: of 0.35-2.0 μm; 3.7-5.0 μm
7. As40Se60 : Transmission range of 0.9 – 14 µm
8. Indium Tin Oxide: Transmission range of 350 – 700 nm
9. Aluminium for Nano-antenna and Micro-antenna Arrays.
Basic Materials for Active UV, Visible and IR Micro and Macroscopic Optical Components
1. Liquid Crystals
3. Dielectric Elastomers
Current Research Projects:
1. Ultra-fast adaptive optical elements based on stressed liquid crystals, Research Project, funded by the NATO Emerging Security Challenges Division, 2015 – 2018, http://www.amu.edu.pl/__data/assets/pdf_file/0016/261313/PRODUCTION-2043166-v2-AC_340-N20140057.pdf
Prof. John L. West, Kent State University, USA;
Prof. Yuriy Reznikov, Institute of Physics, Ukraine;
Prof. Michael Manevich, Lev Academic Center, Israel
The project is devoted to development of fast electrically-controlled optical components based on the use of new LC materials - stressed liquid crystals (SLCs) that are comprised of a LC matrix in which an oriented polymer network is formed. The project will result in the application of the SLC technology for development of several ultra-fast active LC optical components for military and civilian applications. During the implementation of the project the SLC technology will be extended to the components that contain the curved and profiled substrates. The chemical, mechanical, thermal and adhesive properties of SLC materials will be adjusted to the requirements for the optical components and special SLC compositions to get a minimal driving voltage at the fastest electric response and maximal control of the birefringence range will be developed.
2. Development of Micro-structures and Technologies for Novel Ultrafast Dynamic Micro-optical Components, funded by the Chief Scientist Office at the Israeli Ministry of Industry and Economy, State of Israel, Magnet Program, ALTIA Consortium, Joint Project with Dr. Zvi Kotler (Orbotech ltd), 2016 – 2021, https://infocenter.sni.technion.ac.il/sites/altia,
Principal Investigator: Prof. Michael Manevich.
The Project focuses on the following two most important directions:
2.1. Development of the Generic Universal Design and Technology for the Unique Ultrafast Dynamic Beam Shaping Micro-optical Components, based on the innovative nanocolloidal material, which will be operated with the sub-microsecond switching time in the UV, visible and NIR ranges and suitable for the high power laser systems.
2.2. The second direction connected with adaptation of the Generic Universal Design and Technology, fabrication and measurement of the novel specific Ultrafast Dynamic Beam Shaper. This unique patentable Micro-optical Component, based on the innovative nanocolloidal material, will be operated with the sub-microsecond switching time in the UV, visible and NIR ranges and suitable for the high power laser systems.
3. Research and Development of Fast Switching Smart Window Model Based on Liquid Crystal Material, funded by the Ministry of Environmental Protection, State of Israel, 2017 – 2020.
Principal Investigator: Prof. Michael Manevich.
The novel approach proposed in the Project, based on creation of the Fast Switching Smart Window Model using Liquid Crystal/Elastomer Composite Material, allows achieving the following advantages:
3.1. Fast Switching in the range of 100 - 500 milliseconds due to the use of the innovative design, material and technology.
3.2. Switching Time is Regardless of a Window Size.
3.3. Decreasing Fabrication Costs due to the Innovative Simple Design, Technology and Inexpensive Material.
3.4. High Durability.
3.5. The Project has potential for industrial applications.
4. Development of Basic Design and Manufacturing Technology for Millimeter-sized Lens Arrays Operated in the IR Range, JCT R&D Grant, Israel, 2016 - 2017.
Principal Investigator: Prof. Michael Manevich.
Novel basic design and manufacturing technology for Millimeter-sized Lens Arrays, operated in the infrared range, will be developed by our team in this Project. Several samples of the Millimeter-sized Lens Arrays will be fabricated and characterized. Combination of the optimal design and novel basic manufacturing technology with advanced material for fabrication of the Millimeter-sized Lens Arrays, suitable for the infrared range, is proposed.
Completion of the Project will solve interdisciplinary problems of the research, which will combine several technologies (photolithography, micro-structuring, vacuum evaporation and millimeter-sized optics) with advanced photopolymer material, resulting in the development of one final product.
5. Concept and Design Development of the Micro-electro-optical System for Direct Measuring the Stressed Liquid Crystal (SLC) Cell Transmittance, During Alignment of SLC Molecules, Using a Micromechanical Shear, JCT R&D Grant, Israel, 2017.
Principal Investigator: Prof. Michael Manevich.
The performances of liquid crystal cell are tested by electro-optical measurements. The optical response of the cell is usually measured upon voltage application. For accurate measurements a fine tuning of the optical components, and especially the cell, is required. For the measurement of Stressed Liquid Crystal (SLC) cells, the application of controlled micromechanical shear also should be integrated in the micro-electro-optical system, which will be developed.
After completion of the Project, the following results will be obtained:
1. A new concept and a simple design for the micro-electro-optical system of direct measuring the SLC cell transmittance, during alignment of SLC molecules, when one substrate of the cell is micromechanically sheared relative to another substrate, will be developed by our team in this Project.
2. The research directions and Proposal for the next year JCT R&D Project related to the practical creation of the micro-electro-optical system for direct measuring the SLC cell transmittance will be developed.
3. The Project has a great potential for industrial applications in Israel. Completion of this Project and the next year JCT R&D Project related to the practical creation of the micro-electro-optical system for direct measuring the SLC cell transmittance will allow developing the SLC based innovative Ultrafast Dynamic Beam Shaper. The development will be performed in the frame of the Magnet ALTIA Consortium, funded by the Chief Scientist Office at the Israeli Ministry of Industry and Economy, for the use in Orbotech Ltd.
4. Implementation of the Project will simplify the technique of the micro-electro-optical measurements and design for the measuring micro-electro-optical systems, improving a quality of the dynamic components, based on the SLC.
5. The Project will be able to make a serious contribution to the state of knowledge regarding the micro-electro-optical measurements of the dynamic components based on the SLC.
Other Research Projects (for the last eight years only):
6. Proof of Concept for High Efficiency Solar Energy to Electricity Nanoconverter, Research Project, the Ministry of Infrastructures, Energy and Water Resources, State of Israel, 2015 – 2016.
7. Development of Infrared Laser Beam Shaper Based on All-Silicon Micro-structure, JCT R&D Grant, Israel, 2016.
8. Development of Micro-structure and Novel Technology for Infrared Laser Beam Shaper, JCT R&D Grant, Israel, 2015 – 2016.
9. Optimization of Chalcogenide Material Optical Properties, Development of Optical Micro-Waveguide Array Design and Fabrication of the Experimental Sample, JCT R&D Grant, Israel, 2014 – 2015.
10. Development of Design and Technology for Controllable Macroscopic Lenses based on Elastomer Materials and Variable Nitrogen Pressure, JCT R&D Grant, Israel, 2013 – 2014.
11. Feasibility Study of Adaptive Fluidic Optical Component Formation Using Electrowetting, JCT R&D Grant, Israel, 2013 – 2014.
12. Development and fabrication of new unique fast-switching adaptive micro-lens arrays based on stressed liquid crystals, JCT R&D Grant, Israel, 2013 - 2013.
13. Development of Construction and Technology for Electrically Tunable Lenses based on Dielectric Elastomer Films, JCT R&D Grant, Israel, 2012 – 2013.
14. Feasibility Study of Adaptive Fluidic Optical Component Formation, JCT R&D Grant, Israel, 2012 – 2013.
15. Liquid Crystal Devices for Laser Micromachining – LC4LM, Joint R&D Project with Orbotech Ltd funded by the Israeli Ministry of Industry and Trade, Magneton Program,2011 - 2013.
16. Investigation of New Phenomena in Dielectric Elastomer Films; Feasibility Study of Adaptive Micro-optical Component Formation, JCT R&D Grant, Israel, 2011 – 2012.
17. Development of Technology for Creation of CellCam Video Camera for IR Diagnosis, Detection, Monitoring and Laser Based Treatment of Cancer Cells, JCT R&D Grant, Israel, 2011 – 2012.
18. Investigation of new phenomena in super-thin amorphous chalcogenide films; feasibility study of micro-tube formation, JCT R&D Grant, Israel, 2010 – 2011.
19. Investigation of photoinduced orientation of liquid crystals by chalcogenide surface and application for adaptive micro-lens array technology, the Ministry of Science and Technology, State of Israel, Research Project, 2009-2010.
20. Development of design and fabrication technology for reliable adaptive spherical micro-mirror arrays based on chalcogenide and liquid crystal materials, JCT R&D Grant, Israel, 2009-2010.
21. Development of advanced photosensitive materials for alignment of liquid crystals and their application in adaptive micro-lens array technology, the Ministry of Science and Technology, State of Israel, Research Project, 2006-2009.
22. Development of design and fabrication technology of active micro-lens arrays for the visible range based on a hole-patterned electrode structure and liquid crystal material, JCT R&D Grant, Israel, 2007-2009.
Publications and Patents.
The scientists of the Micro/Nano/Technology Center have more than 160 publications and 22 patents.
International Scientific Contacts
1. Prof. J. West, Kent State University, Kent, OH, USA, Joint Research Area: Novel Fast Liquid Crystal Technology.
2. Prof. A. Glushchenko, University of Colorado, Colorado Springs, CO, USA, Joint Research Area: New Application of Liquid Crystal Technology.
3. Prof. P. Shibayev, Fordham University, New York, NY, USA, Joint Research Area: Advanced Composite Materials based on Chalcogenides and Liquid Crystals.
4. Prof. V. Gorobets, TEKNCITY Inc, Redmond, WA, USA, Joint Research Area: Ultra-high Resolution Nanotechnology.
5. Prof. V. Nazarenko, Institute of Physics, Ukrainian Academy of Sciences, Kyiv, Ukraine, Joint Research Area: Innovative Active Micro-Electro-optical Devices.
6. Prof. A. Latyshev, Member of Russian Academy of Sciences, Institute of Semiconductor Physics, Novosibirsk, Russia, Joint Research Area: Novel Nanolithography Techniques and Advanced Materials.
Existing infrastructure and equipment
Research and Educational Labs:
The Current R&D Projects carry out at the Micro/Nano/Technology Center of the Lev Academic Center – JCT, consisting of the jointly acting Active Micro-Optics Lab, Micro-Nano-Structures Lab, Liquid Crystal Chemistry Lab, Micromechanics and Electronic Design Lab, Micro and Nano-Characterization Lab, Educational Lab: Fundamentals of Micro/Nano/Technology.
Educational Lab: Fundamentals of Micro/Nano/Technology
Experts of the Educational Lab “Fundamentals of Micro/Nano/Technology” provide Project Supervision and Laboratory Training for JCT students of the Electronics and Electrical Engineering Department and for students of Advanced Materials Engineering Department of the Jerusalem College of Engineering using the Clean Room and existing Micro/Nano/Technology Equipment at the JCT. The students are exposed to theoretical, technological and practical knowledge in a modern and important Micro/Nano/Technology area. Their capabilities in the High Tech research and industry will be strongly increased.
The Micro/Nano Technology Center, equipped with all the research facilities needed for performing of the existing Projects, occupies a space of 150 sq. meters, including the clean room area of 80 sq. meters: Class 100 – for micro and nano processing and Class 10,000 - for general technology processing.
List of Existing Micro/Nano Technology Center Clean Room Equipment:
Conventional Mask-aligner; Double-sided Mask-aligner; Exposure System for micro-resist processing based on Oriel Series SS 1000 Light Source; Micro-resist Spinner; two Vacuum Systems for thermal evaporation of metals and dry micro- and nano-resists, with deposition rates and film thickness measurements during evaporation using an Inficon XTM Thickness Monitor; Micro Scale Waver Level Packaging Vacuum System; System for Assembly and Sealing of Stressed Liquid Crystal Cells; Liquid Crystal Cell Assembly System; Computerized Ultra Clean 100 oven; Digital Hotplate; Set-up for Rubbing of Aligning Layer; System for UV Curing of optical polymers; Solar Spectrum Simulator Oriel Series SS 1000; Computerized Optical Measurement Station based on Olympus Polarized Microscope for characterization of active micro-optical components; Zygo NewView 8300 Surface Profiler; Measurement System based on Computerized 3D Zygo Micro-interferometer; two Interference Microscopes MII – 4 for 3D Measurement; 3D Measurement System based on Multi-wavelength Confocal Microscope CHRIS, STIL S.A.; Computerized Atomic Force Microscope; Micro/Nanoscope Lietz; Set of Optical Microscopes: Polarized Microscope Balplan, Microscope Biolam – M, Microscope MBS – 9, Microscope “Riechert”;two Optical Tables TMC, model # 788 – 455 – 12 with set of electro-optical, electronic and mechanical devices; Filter-wheel type monochromator; Electronic and electric measurement instruments: Keithley Model 2000 - a 6½-digit high-performance digital multimeter, Agilent DS06012A Oscilloscope; Liquid Nitrogen and Oxygen Dewars as sources of clean dry gases for thermal and cleaning processes.